SiO2纳米球的粒径均一性研究及其在硅光学共振纳米柱阵列中的应用

Improvement on Size Uniformity of SiO2 Nanospheres Applied in Si Optical Resonance Nanopillar-arrays

近年来,半导体纳米结构材料的光学共振效应作为一种重要的光调控手段被广泛应用于各类光电子器件。本文用改进的两步Stober法制备了粒径在270~330 nm之间的单分散二氧化硅纳米球,通过优化工艺参数有效改善了纳米球的粒径均一性。采用恒温加热蒸发引诱自组装方法将纳米球在硅半导体上自组装成单层膜作为掩膜,采用感应耦合等离子体技术刻蚀制备了硅纳米柱阵列并测试了其光反射谱。光谱结果表明直径在300~325 nm之间的硅纳米柱阵列可以激发四极子Mie光学共振,其在可见光波段的最低反射率低于5%,具有良好的光调控性能。

Recently,optical resonances of nanostructured semiconductor were proved highly effective for light management in many optoelectronic devices.In this work,the monodispersed silica nanospheres with particle sizes of 270-330 nm were synthesized by modified two-step Stober method,and the nanosphere size uniformity was improved by optimizing the synthesis conditions.Then,the as-prepared nanospheres were self-assembled into monolayer as etching mask on the silicon substrate by means of constant temperature heating and evaporation.Finally,Si nanopillar-arrays were fabricated by inductively coupled plasma etching.The light reflectance spectra show that the fabricated Si nanopillar-arrays with diameters of 300-325 nm can excite the quadrupole Mie resonance,and the reflectance of lower than 5% was obtained in visible wavelengths,which show excellent light management performances and can further match the requirements of actual optoelectronic devices.