日立S-4800场发射扫描电镜常见故障的维修案例分析

Maintenance case analysis of common malfunctions in Hitachi S4800 SEM

扫描电子显微镜已经广泛地应用于科研和教学领域,它在诸多学科领域,如材料、机械、冶金、能源、化工和环境等,都发挥着非常重要的作用,对扫描电子显微镜常见故障进行分析总结,对科研人员具有重要的参考价值.本文介绍了日立S-4800型场发射扫描电子显微镜经常发生的几个故障问题,详细分析了故障产生的原因,同时结合实际应用经验给出了解决方法,希望对同行人员具有参考价值.

Scanning electron microscopehas been widely applied in the fields of researches and teaching. It is an important tool and applied in many disciplines including materials science, mechanics, metallurgy, energy, chemical engineering, environment, etc. In this manuscript, several malfunctions that often occur in Hitachi S-4800 was introduced. The reasons were analyzed in detail and the relevant solutions were pointed out.