基于MAIA 2.1镀膜机5*6石墨载板的使用研究

Study on The Use of 5*6 Graphite Carrier Based on MAIA 2.1 Coating Machine

本文通过对石墨载板规格尺寸以及MAIA2.1镀膜设备运行模式的研究,优化了MAIA设备的基础硬件,石墨条、防绕镀挡板的规格尺寸;同时研究了使用不同尺寸的防绕镀挡板对硅片背面镀膜质量的影响结果。结果如下:生产双面电池防绕镀挡板突出宽度控制在3~5mm之间最好,生产单面电池防绕镀挡板宽度控制在45~50mm之间最好。

Through the research on the specification of graphite carrier plate and the operation mode of MAIA 2.1 coating equipment,the basic hardware of MAIA equipment,the size of graphite strip and anti-winding baffle are optimized,and the anti-winding of different sizes is also studied.The effect of the baffle on the quality of the coating on the back side of the wafer.The results are as follows:It is best to control the protruding width of the anti-winding baffle of the double-sided battery to be between 3-5 mm,and it is best to control the width of the anti-winding baffle of the single-sided battery to be between 45-50 mm.