压电传感器频响及抗干扰特性多物理场分析研究

Multi-physics Analysis of Frequency Response and Anti-interference Characteristics of Piezoelectric Sensors

为了满足有效测试压气机内部脉动压力场的需求,拟开发、设计具备频响特性宽、灵敏度高、抗干扰性强的传感器阵列。首先建立基于机电耦合的多物理场传感器有限元模型,其次逐一探讨传感器各层材料力学参数与厚度对压电性能的影响,然后分析传感器在0至8×10^4Hz频率环境中的频响特性,最后分析传感器阵列相邻测点间的相互干扰影响,获得传感器压电电势随材料力学参数与结构尺寸的变化规律。结果表明:通过调整传感器各层材料的杨氏模量、厚度可以获得理想的频响带宽、灵敏度及测点间干扰特性。依此对压电传感器阵列进行优化设计,可满足脉动压力场的测试需求。

In order to meet the requirements of effective testing of the internal pulsating pressure field of compressors, a sensor array with wide frequency response characteristics, high sensitivity and strong anti-interference is designed and developed. Firstly, the multi-physics finite element model of the electromechanical coupling of the sensor is established. The influence of the mechanical parameters and thickness of each layer of the sensor on the piezoelectric performance is discussed one by one. Then, the frequency response characteristics of the sensor in the frequency range of 0 - 8×104 Hz are analyzed. Finally, the mutual interference effects between the adjacent measurement points of the sensor array are analyzed, and the variation of the piezoelectric potential of the sensor with the mechanical parameters of the material and the structural dimensions is obtained. The results show that the ideal frequency response bandwidth, sensitivity and the interference characteristics among the measurement points can be obtained by adjusting the Young's modulus and thickness of each layer of the sensor. On this basis, the piezoelectric sensor array is optimized to meet the requirements of the pulsating pressure field test.