四氯化硅的制备工艺综述

Review on preparation technique of silicon tetrachloride

对SiCl4的传统工业生产方法(如工业硅氯化法、硅铁氯化法等)和新发展的制备方法(如硅藻土氯化法、工农业副产物制备SiCl4)进行了分析比较研究,展望了SiCl4制备工艺及应用的发展方向,指出利用硅藻土以及多晶硅副产物制备SiCl4的途径前景广阔,而SiCl4分离提纯技术是解决副产SiCl4出路的关键。

The industrial synthesis methods of SiCl4 mainly include industrial silicon chlorination method,silicon-iron chlorination method and so on,and new synthesis methods of SiCl4 include diatomite chlorination method,with the byproducts from the industry and agriculture,are analyzed and compared.A glimpse into the future of synthesis methods and market prospect of SiCl4 are provided.It points out that SiCl4 prepared by the diatomite chlorination method and by the byproducts from polysilicon production has bright prospects for development,separation and purification techniques is the key to resolve application of SiCl4 prepared by the byproducts from the industry and agriculture.