电感耦合式射频离子源放电与引出特性实验

Experimental of Discharge and Beam Current Extraction for Inductively Coupled Radio Frequency Ion Source

为研究电感耦合式射频离子源性能受离子束流、功率强度、工质流量和栅间电压的影响,以束流直径11 cm射频离子源为对象,完成了射频离子源点火起弧关键物理参数的设计和选择,设计并搭建了电感耦合式射频离子源性能试验系统,通过试验研究了射频放电中离子束流、射频功率、工质流量、栅间电压之间的规律.结果表明:射频离子源试验系统设计合理,能够可靠稳定地工作,真空度低于1.0×10^-3 Pa的氩工质条件下离子束能量大范围独立可调,在100~1500 eV范围引出80~460 mA的离子束流,当工质流量一定时,离子源离子束流随射频功率的增大以1 mA/W比率增加,射频功率一定时,离子源束流强度随工质流量增大,在20 sccm时,离子源束流强度至稳定值或者略微增加,合理控制离子源工作参数可以提高离子源工作性能和效率.

In order to study the relationship between the performance of the radio frequency(RF)ion source and the ion beam current,the RF power,the flow rate and supply voltage,the beam diameter 11 cm RF ion source were used as the research target.The key physical parameters of the RF ion source that could be ignited were selected and designed.An inductively coupled RF ion source performance test system was presented.The law between the ion beam current,the RF power,the flow rate and supply voltage in RF discharge were studied through experiments.The results show that the RF ion source test system is designed to be reliable and stable.Ion beam energy can be adjusted independently over a wide range at the pressure below 1.0×10-3 Pa in the argon,an ion beam current of 80~460 mA is extracted in the range of 100~1 500 eV.When the flow rate is constant,the ion source ion beam current increases with the RF power at a rate of 1 mA/W.When the RF power is constant,the ion source beam increases with the flow rate.At 20 sccm,the ion source beam reaches a stable value or gradually increases.Controlling these parameters reasonably can improve the ion source performance and efficiency.