高温抗氧化铱涂层复合制备技术展望

Prospect of hybrid manufacturing technology on high-temperature anti-oxidation iridium coatings

金属铱具有高熔点及低氧渗透率,是理想的氧气扩散屏障材料,为重要的高温抗氧化防护涂层材料之一,在航空航天领域具有广阔的应用前景。综述了目前较常采用的几种铱涂层制备技术的特点,在对比现有铱涂层制备方法的基础上,提出了原子层沉积/化学气相沉积复合制备技术。分析了该复合制备技术在铱涂层制备方面的优势,并指出发展原子层沉积/化学气相沉积复合制备技术尚需解决的几个关键问题。

Iridium has a high melting point and low oxygen permeability,and it is an ideal oxygen diffusion barrier material.As one of the important high-temperature anti-oxidation protective coatings materials,the iridium coating has a broad application potential in the field of aerospace.The characteristics of several traditional iridium coating preparation techniques have been reviewed in this paper,and atomic layer deposition/chemical vapor deposition hybrid technology has been proposed based on comparative study on the available iridium coating preparation methods.The advantages of the hybrid technology are also analyzed,based on which several key issues should be solved during the development of atomic layer deposition/chemical vapor deposition hybrid technology has been put forward.