小型半密封器件腔体压力变化测量方法研究

Research on Detection Methods of Cavity Pressure Change of Semitight Devices

针对小型半密封器件腔体压力变化无法采用真空计直接测量的特点,提出了一种基于材料放气率测量工作中使用的静态压升法和动态流量法,将两者结合使用的腔体压力间接测量法,并针对某种典型半密封器件产品,采用微型测量传感器进行了原位模拟测试验证。模拟测试结果表明,所提出的腔体压力计算测量法具有测量结果准确,简单可行,能解决小型半密封器件腔体压力测量的难题。该方法适用于陀螺仪充油、制冷机腔体充氦、电推进系统氙气充装等过程中的腔体压力变化实时监测。

In this paper,an indirect cavity pressure measuring method for small semitight device is presented,which is based on characteristics of cavity pressure unable to be directly measured by the vacuum gauge.This method is combined with principle of constant volume method and constant conductance method,which are used in vacuum materials outgassing rates field.For a typical semitight devices,simulation test and comparison work utilize the above method and microssensor in-situ method are carried out.The simulation test results show that the as-proposed cavity pressure detection method is simple and accurate,and can solve the problem of pressure cavity and change of semitight devices.This method is applicable to the real-time monitoring of cavity pressure changes during the process of filling oil of gyroscope,filling helium of mechanical refrigerator and filling xenon of electric propulsion system.