微细中空电极流速测试及侧壁绝缘层制备工艺比较

Flow Rate Test of Micro Hollow Electrode and Comparison of Preparation Process of Sidewall Insulation Layer

针对孔径100~200μm、采用中空供液工艺的高深宽比微细电解加工中,中空电极流速难以在线测量,侧壁绝缘层易出现损伤、脱落等问题,利用不同压力下流速雾化现象在光照下的差异性,建立压力-流速-雾化面积比关系曲线,实现在线流速测试并优化了初始供液压力。通过比较加工孔和加工后电极表面形貌,优选出丙烯酸环氧树脂绝缘层制备工艺,并在304不锈钢片上加工出入口直径180.6μm、出口直径173.8μm、锥度约0.78°的阵列孔,验证了方法应用的可行性。

For high-aspect ratio micro-electrolysis machining using hollow liquid supply process against a hole diameter of 100~200 μm,the flow velocity of the hollow electrode is difficult to on-line measure,and the sidewall insulation layer is prone to be damaged. Using difference of atomization phenomenon under illumination,the pressure-flow rate-atomization area ratio curve is established to realize the online flow rate test and optimize the initial supply pressure. By comparing the surface morphology of the machined hole and the processed electrode,an epoxy resin epoxy layer is preferred,and the processing array holes of 180.6 μm inlet,173.8 μm outlet and taper of 0.78° were fabricated on 304 stainless steel sheets,which verified the application feasibility of the method.