TiO2修饰层对ZnO薄膜结构及发光性质的影响

Influence of TiO2 Modification Layers on the Structure and Optical Properties of ZnO Films

为了增强ZnO薄膜的发光性能,采用溶胶-凝胶法分别制备3层ZnO基和6层ZnO基底上覆不同层数TiO2修饰层的透明薄膜,利用X射线衍射仪、紫外-可见光分光光谱仪和荧光光谱仪对薄膜样品的晶体结构、光致发光性能和可见光透过率进行研究。结果表明:所有混合镀膜样品,其结晶性均受到阻碍,所得样品呈现出明显的非晶状态;TiO2修饰层层数对ZnO薄膜的紫外发光强度有很大的影响,空气退火时3层基的TiO2修饰层最佳层数为1层,6层基的最佳层数为3层,而真空退火时修饰层的最佳层数均为2层;ZnO薄膜紫外发光强度最多可增强近10倍;所有样品可见光波段平均透过率均达到80%以上,修饰层和退火方式对薄膜透过率影响不大。

In order to enhance the luminescence performance of ZnO film,the ZnO thin films with different TiO 2 modification layers on 3 layers and 6 layers ZnO substrates were prepared by sol-gel method.The crystal structure and optical properties of the samples were studied.The results show that all samples showed obvious amorphous state.The number of modified layers has a great influence on the uv luminescence intensity of ZnO films.When air annealing,the best modification layers number of 3 layers ZnO substrates is 1 layer,and the best number of 6 layers ZnO substrates is 3 layers.In vacuum annealing,the best number of modification layers is 2.The uv luminescence intensity of the films can be increased by up to 10 times.The average visible transmittance of all samples reached over 80%.The modification layers and annealing method have little effect on the film transmittance.