摘要
系统介绍了多晶硅生产工艺中还原装置的生产方法、流程特点、流程简述以及本装置的节能减排措施,主要对还原水系统热能利用方面做了详细介绍,并对其实际应用进行了简单描述。
This paper systematically introduces the production method, process characteristics, process description and energy saving and emission reduction measures of the reduction unit in polycrystalline silicon production process, mainly introduces the utilization ofheat energy in the reduction water system in detail, and describes its practical application.
作者
臧楠
熊文博
ZANG Nan;XIONG Wen-bo(Hualu Engineering & Technology Co. Ltd., Xi'an 710065, China)
出处
《工程建设与设计》
2019年第16期131-132,共2页
Construction & Design for Engineering
关键词
改良西门子法
多晶硅
还原
热能利用
improved Siemens method
polycrystalline silicon
reduction
thermal energy utilization