电子铝箔晶粒法向EBSD样品制备及分析方法

EBSD Analysis of Grain of Aluminum Foil for High-voltage Electrolytic Capacitor

本文介绍了一种电子铝箔法向EBSD分析方法,将待制样品用环氧树脂进行镶嵌固化,经过机械抛光、振动抛光和电解抛光,并用丙酮除去镶嵌树脂,然后对样品的有效解析度、晶界特性、立方织构等进行表征分析。结果表明,通过此方法可以获得清晰的EBSD菊池花样,铝箔样品的衍射花样有效解析度为95%,小角度晶界超过95%,立方织构度超过99%,满足高压光箔要求。

The normal electron backscatter diffraction (EBSD) analysis method for aluminum foil was introduced in this paper. The foil samples were solidified by USES epoxy resin and mechanically/vibration/electrolytically polished sequentially, and then stripped the resin in acetone solution. The effective pattern resolution, grain boundary as well as cubic texture were analyzed by EBSD. The results show that the Kikuchi pattern of aluminum foil can be observed clearly, and the effective pattern resolution is over 95 %. The small-angle grain boundary content and cubic texture are over 95 % and 99 % respectively, which can meet the requirements for the high-voltage foil.