交指型MEMS滤波器的优化设计

Optimum Design of Interdigital MEMS Filter

交指型微机电系统(MEMS)滤波器是采用MEMS工艺制备出的交指型结构滤波器,针对交指型MEMS滤波器电磁优化算法中存在速度慢,占用计算资源大等问题,对交指型MEMS滤波器优化设计方法进行了研究。采用主动空间映射算法,在ADS和HFSS软件中建立滤波器电路结构模型和三维结构电磁模型,并分别将它们用于主动空间映射算法所需的粗糙仿真和精确仿真,仅进行了5次精确仿真就完成了一款Ku波段滤波器的优化设计。结果表明,设计的滤波器中心频率为14GHz,顶部损耗为1.6dB,-1dB带宽为2.2GHz,满足设计指标要求,同时验证了优化设计方法的可行性。

The interdigital MEMS filter is an interdigital structure filter fabricated by using the technology of MEMS. Aiming at the problems of slow speed and taking up large computational resources in the electromagnetic optimization algorithm of the interdigital MEMS filter, an optimization design method of the interdigital MEMS filter is studied in this paper. The ADS and HFSS software are used to establish the circuit structure model and three-dimensional structure EM model of the filters which are applied to the coarse simulation and accurate simulation for the aggressive space mapping algorithm respectively, and the optimized design of a Ku-band filter has been completed after only 5 accurate simulations. The results show that the designed filter has the center frequency of 14 GHz, top loss of 1.6 dB and -1 dB bandwidth of 2.2 GHz, which satisfy the design specifications. At the same time, the feasibility of the optimized design method is verified.