基于横向振动模式的压电元件研究

Study on Piezoelectric Element Based on Lateral Vibration Mode

为了解决大规模超声阵列中压电元件电阻抗匹配难度增加的问题,提出一种多层的基于横向振动模式的压电元件构造方法。利用压电陶瓷具有多种振动模式的特性,将基于厚度振动模式工作的压电元件转换为基于横向振动模式工作,在此过程中,压电元件振动方向不变,电极面积增加,间距减小从而其固定电容增加,电阻抗降低。该文提出了一种双层结构模式转换压电元件的构造方法,结合仿真分析,设计了基于横向振动模式压电元件,不进行阻抗匹配,其电阻抗降至约50Ω。

In order to solve the problem of increased electric impedance matching difficulty of piezoelectric elements in large-scale ultrasonic arrays, a multilayer piezoelectric element construction method based on transverse vibration mode is proposed. Based on the characteristics of piezoelectric ceramics with multiple vibration modes, the piezoelectric elements working in thickness vibration mode are converted into transverse vibration mode. In this process, the vibration direction of piezoelectric components is unchanged, the area of electrode increases and the distance between electrodes decreases, so that the fixed capacitance increases and the electrical impedance decrease. In this paper, a two-layer structure mode conversion method for the piezoelectric element is proposed. Combined with the simulation analysis, the piezoelectric elements based on transverse vibration mode are designed. Without impedance matching, the electric impedance is reduced to nearly 50 Ω.