MEMS惯性传感器现状与发展趋势

Research Status and Development Trend of MEMS Inertial Sensor

自上世纪90年代以来,针对MEMS惯性器件的研究越来越多,MEMS惯性传感器开始得到广泛的商业应用。本文对部分MEMS惯性传感器国内外的新近研究成果进行了分类与归纳,分别对MEMS加速度计、MEMS陀螺仪和微惯性测量组合以及惯性微系统进行了研究与分析。对MEMS惯性传感器发展趋势进行了初步推断,认为未来MEMS惯性传感器的发展主要有四个方向:高精度,以满足日益精细化、智能化的应用需求;微型化,以实现便携、分布式应用要求;高集成度,以完成多种功能高密度组合;适应性强,以适应复杂应用环境,拓宽应用范围。

Since the 1990s,the study of MEMS inertial device has become more and more popular,and MEMS inertial sensors have begun to get a wide range of business applications.In this paper,some recent research results of MEMS inertial sensors at home and abroad are classified and summarized,The MEMS accelerometer sensor,MEMS gyroscope,MIMU (Micro Inertial Measurement Unit) and inertial microsystem are reviewed and analysised respectively.The development trend of MEMS inertial sensor is preliminarily infered and it is concluded that the future development of MEMS inertial device mainly has four directions: high precision to meet the application requirements of higher precision and intelligent technology;miniaturization for portable equipment installation;high integration to achieve a multiple functional integration;high adaptability to adapt to complex environment and broaden the scope of application.