摘要
本文主要讲述和利时MC运动控制器在多线切割机上的应用。多线切割是一种通过金属丝的高速往复运动,把磨料带入半导体加工区域进行研磨,将半导体等硬脆材料一次同时切割为数百片薄片的一种新型切割加工方法。通过调试,设备运行稳定,加工精度高,效率快,应用广泛。
This paper mainly describes the application of Hollysys MC motion controller in multi-wire cutting machine.Multi-wire cutting(MWEDM)is a new method of cutting hundreds of slices of hard and brittle materials,such as semiconductors,through the high-speed reciprocating motion of metal wires,bringing Abrasives into the semiconductor processing area for grinding.Through debugging,the equipment runs stably,the processing accuracy is high,the efficiency is fast,and it is widely used.
出处
《智慧工厂》
2019年第7期53-57,共5页
Smart Factory
关键词
多线切割机
和利时MC
伺服
加工辊
Multi-Wire
Cutting Machine
Hollysys MC
Servo Processing Roll