7A04铝合金表面制备Cr/CrN复合膜的研究

Study on Cr/CrN composite film fabrication on surface of aluminum alloy 7A04

利用等离子体增强非平衡磁控溅射技术,在7A04铝合金表面制备Cr/CrN的复合硬质薄膜。研究Ar、N2通量比(即FAr/FN2)和腔体压强对薄膜形貌、物相组成、膜-基结合力及硬度的影响。结果表明:利用磁控溅射技术可以在7A04铝合金表面制备出组织致密均匀且与基体结合良好的Cr/CrN复合薄膜。随FAr/FN2增大,组织生长越来越致密,晶粒形状由柱状晶逐渐向等轴晶转变,膜与基体间的结合力逐渐增大,硬度开始增加然后减小。随着腔体压强的增加,组织生长逐渐疏松,晶粒尺寸逐渐增大,对膜与基体间结合力的影响不大。

A hard Cr/CrN composite film was prepared on the surface of a 7 A04 aluminum alloy by plasma enhanced unbalanced magnetron sputtering. The effects of Ar and N2 flux ratio( FAr/FN2) and cavity pressure on film morphology,phase composition,film-matrix bond strength,and hardness were investigated. The results show that the Cr/CrN composite film with dense structure and good adhesion to the substrate can be prepared on the surface of the 7 A04 aluminum alloy by magnetron sputtering. With the increase of FAr/FN2,the film becomes more and more dense,the grain morphology changes from columnar to equiaxed crystal,the bonding force between the film and the substrate gradually increases,and the hardness initially increase,then decreases. When the cavity pressure increases,the film gradually becomes loose,and the grain size gradually increases,which has little effect on the bonding force between the film and the substrate.