摘要
超声换能器是引线键合系统的核心部件。给出了引线键合系统超声换能器的压电换能器和变幅杆的设计方法,设计了一款80kHz集成电路引线键合用超声换能器,运用ANSYS软件建立其有限元模型并进行了动力学仿真。瞬态分析结果显示,换能器在受电压激励振动后至少要经过500个周期才能进入正常键合工作状态。
Ultrasonic transducer is the core part of wire bonding system. It summaries a kind of ultrasonic transducer with wire bonding system. Based on ANSYS it builds the finite element model, designs a 80 kHz integrated circuit ultrasonic transducer for wire bonding. Transient analysis results show that the voltage excitation enters normal bonding working state after at least 500 cycles.
作者
瞿子博
冯武卫
张玉莲
贾森君
Qu Zibo;Feng Wuwei;Zhang Yulian;Jia Senjun(School of Naval Architecture and Mechanical-Electrical Engineering, Zhejiang Ocean University, Zhejiang Zhoushan, 316022, China;School of Donghai Science and Technology, Zhejiang Ocean University, Zhejiang Zhoushan, 316022, China;Zhoushan Knowledge & Innovation Technology Development Co.,Ltd., Zhejiang Zhoushan, 316026, China)
出处
《机械设计与制造工程》
2019年第8期9-13,共5页
Machine Design and Manufacturing Engineering
关键词
引线键合
超声换能器
有限元分析
wire bonding
ultrasonic transducer
finite element analysis
