基于微机械加工工艺的声子晶体器件

Phononic Crystal Devices Based on Micromachining Technology

声子晶体是一种周期复合人工超材料。声子晶体具有独有的声学特性-声学禁带,使其在声波控制和传输领域具有极强的应用潜力。利用微机械加工工艺制备的硅基声子晶体器件,可在微机电系统中实现高频弹性波的定向传输和控制,以及对弹性波能量的局域放大。设计了两种基于MEMS工艺的器件,分别用于实现功分器和谐振器的功能。内容覆盖了硅基声子晶体器件的背景、原理、设计、制造和表征等方面。

The phononic crystal is a kind of periodic artificial metamaterials. Phononic crystal has a unique acoustic characteristic-acoustic bandgap, which makes it has a great application potential in the field of sound wave control and transmission. The silicon microphononic crystal device prepared by micromachining technology can realize the directional transmission and control of high frequency elastic wave and local amplification of elastic wave energy in MEMS. Two kinds of devices based on micromachining technology were designed to realize the functions of power divider and resonator respectively. It covers the background, principle, design, manufacture and characterization of silicon microphononic crystal devices.