化学气相沉积(CVD)工艺对ZnS力学性能影响的研究

Effect of Chemical Vapor Deposition Process on Mechanical Properties of ZnS

介绍了化学气相沉积法(CVD)制备ZnS过程中,CVD工艺对材料相关力学性能的影响和控制方法。通过X射线衍射分析、扫描电镜和金相显微镜等手段研究了不同工艺下制备的ZnS样品材料的内部结构和缺陷,提出了ZnS生长过程中晶粒尺寸和材料缺陷的控制方法。研究结果表明,设计合理的喷嘴结构,营造稳定的CVD生长环境,提高CVDZnS毛坯一致性,抑制材料缺陷形成,有助于提升ZnS材料力学相关性能。

The influencing factors and control methods of CVD technic on mechanical properties of materials during the preparation of ZnS deposited by chemical vapor deposition (CVD) was introduced in this article. The internal structure and defects of the ZnS samples prepared by different technics were studied by XRD(X-Ray Diffraction), SEM (scanning electron microscope) and metalloscope,the control technology of grain size in CVD growth is proposed. The results indicate that designing reasonable jet structure and creating stable growing condition are conducive to improve the uniformity of CVD ZnS blanks and inhibit the formation of material defects. The mechanical properties of ZnS materials is improved consequently.