电感耦合等离子体串联质谱法测定实验室纯水中痕量硅

Determination of trace silicon in lab pure water by inductively coupled plasma mass spectrometry

建立电感耦合等离子体串联质谱法测定实验室纯水中痕量硅的方法.优化电感耦合等离子体串联质谱仪工作条件,两个四极杆质量过滤器Q1,Q2质量数均为28,碰撞/反应模式为H2原位质量模式,采用标准加入法进行定量分析.硅的质量浓度在0~100μg/L范围内与响应信号呈良好的线性关系,线性相关系数大于0.9999,检出限为0.109μg/L.测定结果的相对标准偏差为1.6%~4.5%(n=7),样品加标回收率为96.2%~103.7%.该方法灵敏度高,测定结果准确、可靠,可用于实验室纯水中痕量硅分析.

A method for determination of trace silicon in lab pure water by inductively coupled plasma mass spectrometry was established. The working conditions of instrument were optimized, the mass numbers of two quadrupole mass filters Q1 and Q2 were both 28, the collision/reaction mode was H2 in situ mass mode. Quantitative analysis was carried out by standard addition method. The mass concentration of silicon had good linear relationship with the response signal in the range of 0–100 μg/L, the linear correlation coefficient was more than 0.999 9, and the detection limit was 0.109 μg/L. The relative standard deviation of determination results was 1.6%–4.5%(n=7). The recoveries were 96.2%– 103.7%. The method is sensitive,accurate and reliable,and it can be used to analyze trace silicon in lab pure water.