摘要
Q-type非球面广泛应用于光学系统设计中,针对Q-type非球面超精密加工过程中的面形检测问题,提出了一种MATLAB软件与Taylor Horbson PGI-1240非球面轮廓仪相结合的方法,以达到对Q-type非球面进行高精度检测的目的。检测结果表明,由Nanoform 700Ultra单点金刚石超精密车床加工的全口径为11.8mm的单晶铜Q-type非球面面形误差峰谷(PV)值为0.1963μm,表面粗糙度方均根(RMS)值为0.03412μm,满足加工第一阶段面形误差PV值<0.2μm和表面粗糙度RMS值<0.04μm的要求。此检测方法可以精确得到工件面形误差,为下一阶段车削加工提供数据支持。
Q-type asphere has broad application prospect which has been applied in optical system design increasingly.But there is no easy or high-efficiency way to test the Q-type aspherical surface precisely until now.Aimed at the testing of Q-type asphere in the process of ultra-precision turning,a method based on MATLAB and Taylor Horbson PGI-1240 aspheric profilometer is proposed.First,we have fabricated a single crystal cupreous Qtype asphere whose aperture is 11.8 mm by Nanoform 700 single point diamond ultra turning lathe.And the testing result shows that,the PV and RMS values of Q-type asphere surface shape error are 0.1963μm and 0.03412μm.It meets the requirement that PV value should be less than 0.2μm as well as RMS value should be less than0.04μm.This testing method can get precise surface shape error and provide data support for next stage of turning.
作者
贾孟
薛常喜
李闯
兰喜瑞
王蕾
王伦
吴百融
Jia Meng;Xue Changxi;Li Chuang;Lan Xirui;Wang Lei;Wang Lun;Wu Bairong(School of Optoelectronic Engineering, Changchun University of Science and Technology, Changchun,Jilin 130022,China)
出处
《激光与光电子学进展》
CSCD
北大核心
2019年第15期103-108,共6页
Laser & Optoelectronics Progress
基金
吉林省重点科技研发项目(20180201030GX)
