基于热模压和切削减薄工艺制备聚合物微静电驱动器

Preparation of Polymer Micro-Electrostatic Actuator Based on Hot-Embossing and Cutting Processes

为了满足运输蛋白质、细胞等微纳米级物体的需求,有必要研制聚合物微静电梳齿驱动系统。与硅静电梳齿驱动器相比,聚甲基丙烯酸甲酯(PMMA)静电梳齿驱动器具有成本低、成品率高、驱动电压低和能耗少等优点。首先通过微细加工工艺,制备硅静电梳齿驱动器模具。基于硅模具,利用热模压工艺制备PMMA微驱动器,再通过机械切削工艺释放制备好的PMMA微驱动器结构,得到带基底的PMMA微静电梳齿驱动器,最后通过切削减薄工艺,释放静电梳齿微结构,得到可动的PMMA微静电梳齿驱动器。驱动结果表明,PMMA微静电梳齿驱动器制备工艺具有可行性。

In order to meet the needs of transporting proteins,cells and other micro-nanoscale objects, it is necessary to develop apolymer micro-electrostatic comb-drive system.Compared with the silicon electrostatic comb-drive actuator,the polymethyl methacrylate (PMMA)electrostatic comb-drive actuator has the advantages of low cost,high yield,lower driving voltage and lower energy consumption.Firstly,a silicon electrostatic comb-finger actuator mold was prepared by the micromachining process.Based on the silicon mold,the PMMA micro-actuator was prepared by the hot-embossing process,and the prepared PMMA micro-actuator structure was released by the mechanical cutting process to obtain the PMMA micro-electrostatic comb-drive actuator with the substrate. Finally,the electrostatic comb microstructure was released by using the cutting process to obtain a movable PMMA micro-electrostatic comb-drive actuator.The driving results show that the preparation process of the PMMA micro-electrostatic comb-drive actuator is feasible.