多弧离子镀TiCrAlCN薄膜及其微观结构与摩擦学性能研究

Multi-arc ion plating of TiCrAlCN coatings and study on their microstructures and tribological properties

采用工业化多弧离子镀设备在4Cr5MoSiV1钢表面制备TiCrAlCN硬质薄膜,以便改善其力学和摩擦学性能。借助扫描电子显微镜、X射线衍射仪、维氏显微硬度计和摩擦磨损试验仪对不同工艺条件下所得TiCrAlCN薄膜的微观形貌、微观结构、力学性能和耐磨性进行分析与测试。结果表明:TiCrAlCN薄膜为纳米晶(TiAl)(CN)固溶体,含少量Cr2N。高碳含量的TiCrAlCN薄膜还含非晶C相、且晶粒细小,具有(111)晶面取向,表现出高硬度和优异的耐磨减摩特性。

TiCrAlCN hard coatings were fabricated on 4Cr5MoSiV1 steel using an industrial multi-arc ion plating set-up to improve the mechanical and tribological properties of 4Cr5MoSiV1 steel.The micro-morphologies and microstructures of the TiCrAlCN coatings obtained under different process conditions were analyzed using scanning electron microscope(SEM),and X-ray diffractometer(XRD),and their mechanical properties and wear resistance were examined using Vickers microhardness tester and friction and wear tester,respectively.The coatings are mainly composed of nanocrystalline(TiAl)(CN)solid solution and contain a small amount of Cr2N.The high-carbon-content TiCrAlCN coating also contain an amorphous phase of carbon and had small grains with(111)plane orientation,exhibiting high hardness and good antiwear and anti-friction properties.