摘要
基于微电磁光开关的工作原理,设计了MEMS电磁反射型光开关.采用ANSYS9.0有限元软件分析结合Mathematica数值计算研究了微电磁光开关所需的电磁力、磁芯线圈的磁场分布、悬臂梁受电磁力的形变状态,从而获得磁芯线圈的匝数、悬臂梁位置、悬臂梁与平面磁芯线圈接触区域等结构参量.
Based on the working principle of micro-electro-optical switch,the structure of electromagnetic reflection type micro-electro-optical switch was designed.Using ANSYS 9.0 finite element analysis combined with Mathematica numerical calculation method,the electromagnetic force,the field distribution of the core coil,and the deformation state of cantilever beam were studied.Thus,the structural parameters such as the coil turns,the cantilever position and the contact area between cantilever beam and plane magnetic core coil were obtained.
作者
吴雅苹
陈晓航
吴志明
WU Ya-ping;CHEN Xiao-hang;WU Zhi-ming(Fujian Provincial Key Laboratory of Semiconductors and Applications,Department of Physics,Xiamen University,Xiamen 361005,China;Collaborative Innovation Center for Optoelectronic Semiconductors and Efficient Devices,Department of Physics,Xiamen University,Xiamen 361005,China)
出处
《物理实验》
2019年第9期10-14,共5页
Physics Experimentation
基金
九江市杰出青年基金项目(No.2018042)
厦门大学校长基金项目(No.20720190055)
关键词
微电磁光开关
磁芯线圈
悬臂梁
有限元模拟
micro-electro-optical switch
core coil
cantilever beam
finite element simulation
