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双层柱状结构对声表面波芯片的声场调控仿真

Acoustic Field Control Simulation of Surface Acoustic Wave Chip Based on Double Column Structure
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摘要 通过将双层柱状微结构加工在SAW芯片表面,在COMSOL有限元仿真软件下实现了声波在结构内部的单点聚焦以及多极局域效应,并得出了结构尺寸与声波频率的对应关系. By machining double-column micro-structures on the surface of SAW chip,single-point focusing and multi-pole localization effects of acoustic waves within the structure were achieved under COMSOL finite element simulation software,and the corresponding relationship between structure size and acoustic frequency was obtained.
作者 唐帅 梁辰 许丽萍 温廷敦 韩建宁 TANG Shuai;LIANG Chen;XU Li-ping;WEN Ting-dun;HAN Jian-ning(School of Science,North University of China,Taiyuan 030051,China;School of Information and Communication Engineering,North University of China,Taiyuan 030051,China)
出处 《云南师范大学学报(自然科学版)》 2019年第5期46-52,共7页 Journal of Yunnan Normal University:Natural Sciences Edition
基金 国家自然科学基金资助项目(61671414) 山西省青年基金资助项目(201601D202035) 中国博士后科学基金资助项目(2017M611198)
关键词 超构材料 声表面波 声场调控 局域共振 Metamaterials Surface acoustic wave Acoustic field regulation Local resonance
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