摘要
化学机械干式研磨的最大去除率产生于化学固相反应与机械作用达到平衡时。建立了固相反应转化率的数学模型,以全面分析其影响因素。从影响因素中选择4个主要参数,展开固结SiO2磨料磨具研磨蓝宝石的试验研究。试验结果表明,按影响显著程度由高到低排列的4个参数分别为磨具转速、载荷、磨料粒径、磨料与结合剂的质量百分比,所研究范围内的化学机械作用最优参数组合是:粒径45μm,百分比30%,载荷0.6MPa,转速150r/min。
The maximum removal rate of chemical mechanical dry lapping was produced when the balance between the chemical solid-state reaction and mechanical action was achieved. The mathematic model of solid-state conversion rate was established to comprehensively analyze the influencing factors. 4 main parameters were selected from the influencing factors to carry out the experimental research on the lapping of sapphire with fixed SiO 2 abrasive tools. The experimental results show that the 4 parameters ranked from high to low according to the significant degree of influence are the abrasive tool rotation speed, load, abrasive particle size, and the percentage of abrasive to the binder. The optimum parameter combination of chemical and mechanical action within the scope of research is that abrasive particle size is as 45 μm, percentage of abrasive to the binder is as 30%, load is as 0.6 MPa, and abrasive tool rotation speed is as 150 r/min.
作者
袁巨龙
王洁
吕冰海
黄晟
张韬杰
杭伟
YUAN Julong;WANG Jie;LYU Binghai;HUANG Sheng;ZHANG Taojie;HANG Wei(Ultra-precision Machining Center, Zhejiang University of Technology, Hangzhou, 310014;Fair Friend Institute of Electromechanics, Hangzhou Vocational & Technical College, Hangzhou, 310018)
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2019年第18期2185-2190,2197,共7页
China Mechanical Engineering
基金
国家自然科学基金资助项目(51575492,51605440,U1401247)
中国博士后科学基金资助项目(2017M621966)
关键词
研磨
固相反应
转化率
磨具
lapping
solid state reaction
conversion rate
grinding tool