标准硅片波数定值及测量不确定度

建立标准硅片波数值的测定方法,并对波数值的测量结果进行不确定度评定。方法:以硅片作为样品,用精密拉曼光谱仪测量520cm^-1附近的拉曼散射信号,记录该峰位的相对波数值。建立数学模型,分析各不确定度分量引入的不确定度,评定波数值的测量不确定度。

To establish a method for standard silicon wavenumber value and evaluation of measurement uncertainty for wavenumber value.Ods:The sample is silicon wafer,measured of Raman scattering signal near 520 cm^-1 by a precision Raman spectrometer and recorded the relative wave value of the peak.To establish a mathematical model and analysis of the each uncertainty component.Evaluation of measurement uncertainty for wavenumber value.