摘要
采用区域熔炼生长单晶的方法提纯超高纯锗,采用镀碳膜石英舟为容器,提纯后的锗锭在液氮温度下检测净杂质浓度。实验讨论了区熔次数和保护气氛对提纯效果的影响,结果表明区熔次数的增加可以明显提高提纯效果,在10~20次的范围内,最佳区熔次数为20次;在氢气氛围下提纯可避免微量氧对提纯的不利影响,有利于得到更高纯度的锗。实验提纯得到的锗锭净杂质浓度最低为5×1010cm^-3。
High purity germanium was purified by zone refining and growing single crystal,carbon coated quartz boat was used as the container,and the purity test was carried out in the atmosphere of high purity nitrogen and hydrogen. The effects of zone passes and protective atmosphere on the purification effect were discussed. The results showed that the increase of zone passes could obviously improve the purification effect. Within the range of 10 ~ 20 passes,the best zone passes were 20 passes. The purification in the atmosphere of hydrogen could avoid the adverse effect of trace oxygen,which was conducive to the production of germanium with higher purity. The net impurity concentration of purified germanium ingots was as low as 5×1010 cm^-3.
作者
赵青松
牛晓东
黄幸慰
朱刘
ZHAO Qing-song;NIU Xiao-dong;HUANG Xing-wei;ZHU Liu(Vital Advanced Materials Co., Ltd., Guangdong Qingyuan 511517;First Materials Co., Ltd., Guangdong Qingyuan 511517;RPM Co., Ltd., Guangdong Qingyuan 511517;First Rare Materials Co., Ltd., Guangdong Qingyuan 511517;Vital Thin Film Materials (Guangdong )Co., Ltd., Guangdong Qingyuan 511517, China)
出处
《广州化工》
CAS
2019年第17期88-90,共3页
GuangZhou Chemical Industry
关键词
超高纯锗
区域熔炼
区熔次数
净杂质浓度
high-purity germanium
zone refining
zone passes
net impurity concentration