激光热辅助磨削石英玻璃的实验研究

Experimental Study on Laser Heat-Assisted Grinding Quartz Glass

采用正交实验研究了工艺参数对石英玻璃激光热辅助磨削后的表面粗糙度、表面形貌和砂轮磨损情况的影响.结果表明:激光热辅助磨削可以提高临界磨削深度、石英玻璃的表面磨削质量及效率.激光功率对激光热辅助磨削表面粗糙度影响最大,但不呈线性关系,最优激光功率为175 W,对应粗糙度为0.262.通过激光辅助,实验过程中玻璃脆性下降,塑性提高,实现了石英玻璃的塑性域磨削,减轻砂轮磨损,降低了磨削表面的剥落坑.

The effects of process parameters on the surface roughness,surface morphology and wear of the grinding wheel were studied by the orthogonal test after quartz glass was treated by laser heat assisted grinding.The results showed that laser heat-assisted grinding can improve the critical grinding depth,the surface grinding quality and work efficiency of quartz glass.The laser power has the greatest influence on the roughness of laser-assisted grinding,but there is no linear relationship.The optimal laser power is 175W,and the corresponding roughness is 0.262.With the aid of laser,the brittleness of glass decreases and the plasticity increases during the experiment,which realizes the plastic domain grinding of quartz glass,reduces the wear of the grinding wheel and decreases the peeling pit of the grinding surface.