环境扫描电镜工作原理及应用

Working Principle and Application of Environmental Scanning Electron Microscope

介绍了环境扫描电镜(ESEM)的工作原理及其在各类材料中的应用。ESEM继承了扫描电镜(SEM)的全部优点,在聚合物材料、非导电晶体材料、压电晶体材料、含水生物样品等的研究中得到广泛应用,并显示出其具有制样简单、样品室环境可变、有独特的像衬度原理、可观察动态过程等独特优点;ESEM尤其可以消除普通SEM无法观察含水样品以及镀导电层会掩盖样品表面精细结构的缺点。但ESEM依然还存在气体环境会对电镜造成污染、无法避免电子束轰击对样品表面造成损伤等缺点。

An introduction was presented to the working principle of environmental scanning electron microscope (ESEM) and its application in various areas.ESEM inherits all the advantages of scanning electron microscope (SEM) and is widely used in the research of polymer materials,non-conductive crystal materials,piezoelectric crystal materials and aqueous biological samples.ESEM shows that it has advantages such as a simple sample preparation process,a variable sample chamber environment,unique contrast principle and observable dynamic reaction process.ESEM has especially eliminated the disadvantage that ordinary SEM can not observe aqueous samples and the conductive gold layer will cover the fine structure of the sample surface.But ESEM still has the disadvantages that the gas environment will pollute the electron microscope and the damage caused by the electron beam bombardment will not be avoided.