摘要
与传统的传感器相比,MEMS传感器结构的微小变差将会对其性能的稳定性产生较大影响,因此将稳健设计应用到MEMS传感器的结构设计中具有十分重要的意义。文中以锆钛酸铅(PZT)纳米纤维MEMS压电式传感器为例,分析其主要结构和工作原理,对其进行压电性能分析,并建立了基于随机模型的稳健设计数学模型。开发相应的算法程序,并求得稳健设计解。对稳健设计的结果进行分析,结果表明稳健设计解在设计变量和噪声因素发生变差时具有稳健性。
Compared with traditional sensors,the small variation of MEMS sensor structure will have a great impact on the stability of its performance.Therefore,it is of great significance to apply robust design to the structural design of MEMS sensors.Taking the Pb-based Zirconate Titanate(PZT)nanofiber MEMS piezoelectric sensor as an example,the main structure and working principle are analyzed,and the piezoelectric performance is analyzed.The mathematical model of robust design based on stochastic model is established.The corresponding algorithm program is developed and a robust design solution is obtained.The results of robust design are analyzed.The results show that the robust design solution is robust when design variables and noise factors are degraded.
作者
鲍娜娜
谭晓兰
刘扬
吕博
BAO Nana;TAN Xiaolan;LIU Yang;LYU Bo(College of Mechanical and Materials Engineering,North China University of Technology,Beijing 100144,China)
出处
《机械工程师》
2019年第10期25-27,31,共4页
Mechanical Engineer
基金
国家自然科学基金资助项目(51375017)
