基于PVDF的高压电性薄膜制备工艺研究

Study on preparation process of high-voltage electrothinfilm based on PVDF

针对国内的聚偏二氟乙烯(PVDF)压电传感器仅限于实验室阶段,仍需要大量进口的现状,通过对PVDF压电特性分析,结合传感器产品的结构,进行PVDF压电传感器的制备工艺的研究。对工艺过程中的初始薄膜制备、单轴拉伸、高压极化和磁控溅射等主要工艺进行制备工艺参数的探索,获得了PVDF压电敏感薄膜,并采用聚酰亚胺材料进行封装,得到PVDF压电传感器。对该传感器进行关键参数静态压电系数d33的测试,结果为13.1PC/N,获得了满足实际工程使用的PVDF压电传感器产品。

Aiming at the present situation that domestic polyvinylidene fluoride(PVDF) piezoelectric sensor only is restricted in the laboratory stage,massive imports are still needed.The preparation technology of PVDF piezoelectric sensor is studied by analyzing the piezoelectric characteristics of PVDF and combining the structure of sensor products.The preparation process parameters of the main processes such as initial film preparation,uniaxial tensile,high pressure polarization and magnetron sputtering in the process are explored.Sensitive PVDF piezoelectric film is obtained and polyimide materials are used for packaging,PVDF piezoelectric sensor is achieved.Key parameters of the sensor,static piezoelectric coefficient d33 is test,the results is 13 PC/N.PVDF piezoelectric sensor products satisfied practical engineering is obtained.