超薄光学元件的精密性加工关键技术探讨

Discussion on Key Technologies of Precision Machining for Ultra-thin Optical Elements

在加工超薄光学元件的过程中,会因为重力和磨头而产生应力形变。于是,一种具有高效率、先进性加强的超薄光学元件综合加工法被提出。这种方法在进行面形控制的时候,全面充分的运用了离子束修形、精密抛光、精密铣磨。在开展精密铣磨的阶段时,主要是通过分析受力和采用误差补偿的方法以实现降低因为元件发生变形而造成的面形误差。在超薄光学元件的精密抛光接管,则是主要利用气囊抛光迭代以及沥青抛光迭代以实现短时间内收敛收敛面形的目的。在离子束加工的阶段,主要是利用离子束基本加工特点以实现修正面形的高精准度。

In the process of machining ultra-thin optical elements,stress deformation will occur because of gravity and grinding head.Therefore,a comprehensive machining method of ultra-thin optical elements with high efficiency and advanced nature has been proposed.This method makes full use of ion beam modification,precision polishing and precision milling when controlling the surface shape.In the stage of precision milling and grinding,the surface shape error caused by the deformation of the component is reduced by analyzing the force and adopting the method of error compensation.In the precision polishing pipe of ultra-thin optical element,it is mainly to use the airbag polishing iteration and the asphalt polishing iteration to achieve the purpose of converging the convergence surface in a short time.In the stage of ion beam processing,the basic machining characteristics of ion beam are mainly used to realize the high precision of modified surface shape.