一种高精细度MEMS光纤F-P压力传感器

A High Fineness Optical Fiber F-P Pressure Sensor Based on MEMS

提出并通过实验研究了一种高精细度微机电系统(MEMS)光纤法布里-珀罗(F-P)压力传感器。该传感器基于MEMS技术,将硅片与Pyrex#7740玻璃片阳极键合并镀上高反介质膜构成一个高精细度的F-P腔。当外界压力发生变化时,F-P腔长会发生变化;采用高灵敏度光纤白光干涉测量技术,通过测量F-P腔长就可获得被测压力。实验结果表明,该传感器压力测量分辨率高,线性度高,并具有低温漂特性。

In this paper, a high-fineness optical fiber Fabry-Perot (F-P) pressure sensor based on micro-electromechanical system ( MEMS) is proposed and experimentally demonstrated. The sensor is a high-fineness F-P interferometer formed by a silicon diaphragm and a Pyrex# 7740 glass sheet both coated with high-reflection film. The change of pressure causes the length change of F-P cavity. Thus, based on the high-sensitive optical fiber white light interferometry, the pressure can be obtained by measuring the cavity length of the F-P. Experimental results show that the pressure sensor has properties of good measurement resolution, high linearity and low temperature drift characteristics.