摘要
Novel construction of a resonant-cavity-enhanced photodetector(RCE-PD) with monolithic high-contrast grating(HCG)is proposed to overcome the difficulty of fabricating a high reflective mirror of RCE-PD at 1 550 nm. In this structure,HCG serves as the top mirror of the RCE-PD, whereas InGaAs serves as a sacrificial layer to achieve monolithic integration.During the bandwidth optimization, the ratio of the thickness of the total intrinsic region and the absorption layer is introduced to realize the simultaneous optimization of the thickness of spacing layers and absorption layer. After structural optimization, the quantum efficiency of the device with diameter of 20 μm is 82% at 1 550 nm, and the 3-dB bandwidth is 34 GHz at a bias of 3 V.
基金
supported by the National Natural Science Foundation of China(Nos.61674018,61574019 and 61674020)
the Specialized Research Fund for the Doctoral Program of Higher Education of China(No.20130005130001)
the Beijing Municipality Natural Science Foundation(No.4132069)
