气相色谱—质谱联用法对电子气中痕量氟化物的定性与定量

Qualitation and Quantitation of Trace Fluoride in Electronic Grade Gas by Gas Chromatography-Mass Spectrometry

使用气相色谱—质谱联用法,采用全扫描模式,采取提取特征离子的方式对原始谱图进行处理,建立了电子气中微痕量氟化物杂质的定性、定量方法。检测限低、灵敏度高,单次进样,便可实现对多种氟化物杂质的定性和定量,且不受主成分的影响,是分析电子气中微痕量氟化物杂质高效精确的分析方法。

In this essay,gas chromatography-mass spectrometry(GC-MS)was used to establish the qualitation and quantitation methods for the micro/trace fluoride impurities in the electronic grade gas.SCAN mode was used and characteristic ions were extracted to analyze the spectra.The method has low detection limit,and high sensitivity;single injection can achieve qualitative and quantitative determination of a variety of fluoride impurities,and is not affected by the main component.It is an efficient and accurate analysis method for the analysis of micro/trace fluoride impurities in electronic grade gases.