摘要
集成式偏振红外焦平面探测器是红外探测器应用的新的发展方向,国内近几年开展了相关的研究工作,本文围绕集成式长波320×256碲镉汞偏振红外焦平面探测器的研制,叙述了从技术路线选择到偏振结构的设计、制备等方面开展的工作及阶段测试结果,这些工作为后续的研制打下了良好的基础。
Integrated polarization infrared focal plane detector is a new development direction of infrared detector application,and relevant research work has been carried out in China in recent years.Focusing on the development of integrated polarization LW 320×256 HgCdTe infrared focal plane detector,this paper introduces the work from the selection of technical route to the design and preparation of polarization structure,and presents the phase test results,which lays a good foundation for the subsequent development.
作者
林国画
张敏
孟令伟
宁提
刘明
LIN Guo-hua;ZHANG min;MEN Ling-wei;NING Ti;LIU Ming(North China Research Institute of Electro-Optics,Beijing 100015,China)
出处
《激光与红外》
CAS
CSCD
北大核心
2019年第10期1234-1238,共5页
Laser & Infrared
关键词
集成偏振探测器
光刻
偏振对比度
polarizer fabricated onto detector
lithography
extinction ratio