有源相控阵天线瓦片式T/R组件基板气密性研究

Research on Gas Tightness for Active Phased Array Antenna Stacked T/R Modules

瓦片式有源相控阵天线具有体积小、质量轻和频率高等优点,是目前研究的热点。LTCC基板在有源相控阵天线瓦片式T/R组件中,不仅提供电路功能,还提供结构支撑作用。对DuPont和Ferro两种LTCC基板封装体进行气密性测试,分析试验结果发现:DuPont基板本身的气密性可以达到10^-9Pa·m^3/s;Ferro基板由于材料本身的多孔结构,在压力作用下,基板表层一定厚度内多孔结构中吸附大量气体,气密性介于10^-8~10^-6Pa·m^3/s之间,这种基板本身的气密性表现,将会直接影响以Ferro基板作为封装外壳的T/R组件气密性测试结果。

The stacked active phased array antenna is a research hotspot because of the advantages of small size,light weight and high frequency performance.LTCC substrate provides not only circuit functions, but also structure support in T/R modules of the stacked active phased array antenna.Gas tightness of DuPont and Ferro LTCC substrate packages was tested.The results show that the leak rate of package with DuPont substrate is less than 10^-9 Pa·m^3/s;But the leak rate of package with Ferro substrate is intermediate between 10^-8 Pa·m^3/s to 10^-6 Pa·m^3/s.The reason is that the porous structure in a certain thickness of the Ferro substrate surface absorbs a large amount of helium under a certain pressure.The results have a directly effect on the gas tightness of T/R modules with Ferro substrate as package.