一种SECS/GEM协议的实现方法

An Implementation Method of SECS/GEM Protocol

为实现半导体设备接入工厂信息化管理平台,提出一种半导体设备通讯标准SECS/GEM协议的实现方法。通过对协议的整体分析,将各层协议的通讯状态合并,并在动态链接库中实现状态间的转换,应用程序通过调用动态链接库的方式实现与设备本身特性相关的协议。详述了动态链接库的实现方法,实测结果验证了方法的有效性,具有良好的实用性和可移植性,适应于各种半导体设备的联网实现。

In order to realize semiconductor equipment access to factory information management platform, a method of implementing SECS/GEM protocol, which is the communication standard of semiconductor equipment, is proposed. Through the overall analysis of the protocol, the communication state of each layer protocol is merged, and the state transition is realized in the dynamic link library. The application program implements the protocol related to the characteristics of the device itself by calling the dynamic link library. The implementation method of the dynamic link library is described in detail. The experimental results verify the effectiveness of the method. It has good practicability and portability, and is suitable for the Network Realization of Various Semiconductor Equipment.