一种基于石英玻璃衬底的MEMS阶跃交指滤波器

A MEMS Step Interdigital Filter Based on Quartz Glass Substrate

提出了一种基于石英玻璃衬底的MEMS 5阶交指滤波器。利用三维全波电磁仿真软件CST,对设计的5阶交指滤波器进行结构优化和数值仿真。结果表明,该滤波器的中心频率为4.08GHz,带内插损小于1.5dB,带宽为1.21GHz,大于基于硅衬底的7阶交指滤波器的0.8GHz带宽。该方案减小了交指滤波器的尺寸,增加了带通滤波带宽,提高了滤波性能。讨论了硅、氮化硅、氮化硼和高硼硅玻璃等衬底材料与低阻抗长度对滤波器性能的影响,理论验证了低功耗、宽频滤波的5阶交指滤波器的性能。结果表明,石英玻璃衬底具有最佳的综合性能。

A micro-electromechanical fifth-order interdigital filter based on quartz glass substrate was proposed. The 3Dfull-wave electromagnetic simulation software CST was used for structural optimization the and numerical simulation of the designed fifth-order interdigital filter.Results showed that the filter had a center frequency of 4.08 GHz,a wideband of 1.2GHz and an in-band insertion loss of less than 1.5dB.The bandwidth was greater than the 0.8GHz bandwidth of the silicon-based seventh-order interdigital filter.This scheme reduced the size of the interdigital bandpass filter,increased the bandwidth of the bandpass filtering,and improved the filtering performance.In addition,the microwave performance of fifth-order interdigital filter with low power loss and wideband filtering was theoretically verified by discussing the effects of different substrate materials such as silicon, silicon nitride,boron nitride and borosilicate glass on the performance of the filter.The results showed that the quartz glass substrate had the best comprehensive performance.