摘要
铁电材料具有负电容特性,可应用于新一代超低亚阈值摆幅晶体管中。由于铁电负电容具有准静态特性,在实际测试中,难以直接观测到单独铁电电容的负电容现象。基于“Ginzburg-Landau”模型,采用TCAD软件,构建了紧凑的HfO2铁电电容结构,并通过仿真获得了匹配的RC电路参数,验证了负电容特性。同时,仿真研究了外加电压幅值与串联电阻阻值对铁电电容负电容效应可测试性的影响。
Ferroelectric materials have characteristics of negative capacitance and could be used to realize low subthreshold swing of MOSFETs.Due to the“quasi-static negative capacitance”characteristics,in actual tests,it is difficult to observe directly the negative capacitance phenomenon of a single ferroelectric capacitor.Based on the Ginzburg-Landau model,a structure of HfO2ferroelectric capacitor was constructed by TCAD software.Matching parameters of RCcircuit were obtained by simulation,and the characteristics of negative capacitance were verified. Meanwhile,the influence of the amplitude of applied voltages and the resistance value of resistors in series on the testability of negative capacitance effect of ferroelectric capacitors was investigated.
作者
王步冉
李珍
谭欣
翟亚红
WANG Buran;LI Zhen;TAN Xin;ZHAI Yahong(Southwest China Research Institute of Electronic Equipment,Chengdu 610036,P.R.China;State Key Lab.of Elec.Thin Films and Integr.Dev.,University of Electronic Science and Technology of China,Chengdu 610054,P.R.China)
出处
《微电子学》
CAS
北大核心
2019年第5期724-728,共5页
Microelectronics
基金
电子元器件可靠性物理及其应用技术重点实验室开放基金资助项目(ZHD201601)
中央高校基本科研业务费专项资金资助项目(ZYGX2016J047)
关键词
铁电材料
负电容效应
负电容场效应晶体管
ferroelectric material
negative capacitance effect
negative capacitance FET
