摘要
本文选取了几种具有代表性的衰减陶瓷作为研究对象。将原料粉体按照配方混合,通过干压与等静压结合的形式成型为坯体,再分别经过还原或惰性气氛下烧结成瓷,最后通过磨切加工制备出陶瓷衰减性能的测试样品。将这几种测试样品通过矢量网络分析仪分别在X波段下测试其介电常数和介电损耗,然后将这几种测试样品放入真空热处理炉中做升温热处理实验,将热处理后的试验样品再次进行衰减性能的测试。对比热处理前后陶瓷衰减性能的变化趋势,通过计算数据变化的变异系数来对比分析这几种衰减陶瓷样品的热稳定性。研究表明,氧化铝基-TiO2和氮化铝基-碳化硅衰减陶瓷的热稳定性表现优异。
Several representative attenuation ceramics were prepared.The raw material powders were mixed according to the formula,formed into green bodies by dry pressing and isostatic pressing,and sintered into ceramics under reduction or inert atmosphere respectively.The ceramic samples for attenuation property testing were finally obtained by grinding.The dielectric constant and dielectric loss of these samples in X-band were first measured by vector network analyzer,then these samples were put into vacuum furnace for heat treatment and the attenuation properties were tested again.The variation trends of attenuation properties of ceramics before and after heat treatment were compared,and the thermal stabilities of these attenuated ceramic samples were analyzed by calculating the data variation coefficient.The results show that the thermal stabilities of Al 2O 3-TiO 2 and AlN-SiC attenuation ceramics are excellent.
作者
刘钊
鲁燕萍
LIU Zhao;LU Yan-ping(Beijing Vacuum Electronics Research Institute,Beijing 100015,China)
出处
《真空电子技术》
2019年第5期53-57,共5页
Vacuum Electronics
关键词
衰减陶瓷
热稳定性
氧化铝
氮化铝
Attenuation ceramics
Thermal stability
Alumina
Aluminum nitride