ACT涂胶显影台高精度热板温度校准

Temperature Calibration of High Precision Hot Plate Process Station of CLEAN TRACK ACT

介绍了ACT涂胶显影台高精度热板的温度控制原理并提出了温度测量方法,结合实际案例对其验证。结果表明这种测量方法可以达到较高精度,能够满足关键工艺要求。另外还介绍了其拓展应用,效果很理想,不仅节约了成本,使机台及时恢复生产,而且工艺流程得到优化,大大提高了产能;同时完善了机台PM项目,定期对机台冷热板进行温度校准,排除隐患,对实际生产中的高精度热板温度校准有较强的指导作用。

The temperature control principle of high precision hot plate and the method of temperature measurement are introduced in detail,and verify it with actual cases.The result shows that this method can achieve a certain precision,and meet key process requirements.In addition,it also introduces its expansion application,and the result is ideal.This method not only saves costs,enables the machine to resume production in time,but also optimizes the process recipe,greatly improving production efficiency and capacity.At the same time,we have perfected the machine PM project,and regularly measure the temperature of the hot and cold plate of the machine,and eliminate the hidden trouble.It can guide the high precision hot plate temperature calibration in practice.