纳秒脉冲激光加工高反射率铝膜

High reflectivity aluminum film processed by nanosecond pulse laser

为了研究基于近红外纳秒脉冲激光的高反射率金属薄膜的加工可行性以及加工效果,采用纳秒脉冲激光对高反射率铝膜进行激光加工,分别测量了在不同激光光斑尺寸和不同激光能量的条件下,铝膜表面所发生的烧蚀形态变化.结果表明,即使铝膜表面反射率高达96%,依然能对铝膜进行激光加工;使用较高功率激光对铝膜表面进行离焦加工(能量密度约小于1000J/mm^2)的烧蚀图样比使用较低功率激光对铝膜表面进行对焦加工(能量密度约大于2000J/mm^2)的烧蚀图样更加规则.相关实验结果对激光加工高反射率材料时激光参量的选择可起到一定的指导作用.

In order to study the feasibility and effect of fabrication of metal films with high reflectivity based on near infrared nanosecond pulsed laser, high reflectivity aluminium films were fabricated by nanosecond pulsed laser. Under the conditions of different laser spot sizes and different laser energy, the change of ablation morphology on the surface of aluminium film was measured. The results show that, even if surface reflectivity of aluminium film is as high as 96%, the aluminum film can still be processed by laser. The ablation pattern of defocusing ( energy density less than 1000J/mm^2 ) on the surface of aluminium film by high power laser is more regular than that of focusing ( energy density greater than 2000J/mm^2 ) on the surface of aluminium film by low power laser. The relevant experimental results can play a guiding role in the selection of laser parameters in laser processing of high reflectivity material.