正向磁控式冷规低压放电机理的研究

Study on Mechanism Discharges in Normal Magnetic Gauge at Low Pressures

本文从正交电磁场理论出发,阐述正向磁控式冷规在低压强下放电的基本特征和放电参数,并与实验结果进行比较。结果表明,理论与实验能较好地符合。

Acoding to the theory of cross-field,this paper expounds the basic characterstics and discharge parameter on discharges in normal magnetic gauge at low pressures.The results of the theoretical calculation are basically accordant with those of the experiment.