扫描电镜背散射衍射装置及数据处理系统

Development of an Electron Back-scattering Diffraction and Data Processing System for SEM

电子背散射衍射装置是获取材料的亚微米的范畴晶体学信息扫描电镜附件 ,此装置可在观察材料的形貌及分析成分的同时研究材料的取向关系。本文介绍了电子背散射衍射接收系统 ,该系统的CCD以快速方式接收的灵敏度为 5mlux ,积累方式接收的灵敏度为 10 μlux ,分辨率为 5 12dpi,扫描卡最高的分辨率为 40 96X40 96。并成功地安装在北京有色金属研究总院JSM 840扫描电镜上。此系统设计合理、结构简单、操作方便安全。同时根据Hough变换的原理 ,编写了识别电子背散射衍射花样的软件 ,实现了全自动实时识别此花样 。

This paper describes an electronic back scaffering diffraction system, which has been successfully developed for JSM-840 SEM in GRINM. The CCD sensitivity of the system is 5 millilux for the mode of live video rate,10 microlux for the normal integrate mode,and the resolution of the CCD is 512 dpi. The highest resolution of scanning card is 4096X4096. The design of the system is reasonable, and the construction is compact. The system is easy to operate,with safety and reliability. The bands of diffraction pattern can be automatically ident ified by using our software.