摘要
本文分析压电陶瓷式微驱动装置的工作原理及其运动模式,设计了具有参数识别与自校正功能控制系统,改善了微驱动装置的性能,提高了驱动精度。在应用于国家光学计量仪器上,其性能指标达到国际同类产品先进水平。
This paper describes the principle of piezoelectric transducer andmoving model designed a cointrol system having the system parameters identifica-tion. and the modly eference approach-self-conection control funtion. It makes the performance of the piezoelectric transducer and the accurate of trans-ducer be improved. The developed high piezoelectric transducer is used saccessfuly inoptical measure instrument, and its technical characteristics can be compared withsome product of international standard.
关键词
压电陶瓷
微驱动
参数识别
piezoelectric
micro-move device
parameters idenfification
self-contral
