哈特曼-夏克传感器的泽尼克模式波前复原误差

Zernike Modal Wavefront Reconstruction Error of Hartmann-Shack Wavefront Sensor

利用哈特曼夏克传感器测量圆孔径内波像差时 ,通常使用泽尼克模式复原算法。推导了一般情况下哈特曼夏克传感器泽尼克模式波前复原误差的计算公式。用哈特曼夏克传感器测量一个像差板的随机静态像差 ,通过与ZYGO干涉仪的测量结果比较 ,得到不同泽尼克模式复原阶数下的波前复原误差的实验结果 ,并与理论计算结果进行了对比。

Zernike modal wavefront reconstruction algorithm was used commonly for Hartmann-Shack sensor in circle apertures. Formulas to calculate the modal wavefront reconstruction error of Hartmann-Shack sensor in general condition were deduced. An aberration plate containing random static wavefront aberrations was measured with a Hartmann-Shack sensor and a ZYGO interferometer respectively, then the modal wavefront reconstruction error of Hartmann-Shack sensor while using different Zernike polynomials was obtained. The experimental result were analyzed and compared with theoretical calculations.