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Cold Light Mirror Fabricated by Electr on Beam Evaporation of TiO_2 and SiO_2

Cold Light Mirror Fabricated by Electron Beam Evaporation of TiO_2 and SiO_2
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摘要 A process suitable for production on a large scale of cold light mirror for film projector is introduced. Deposition parameters required for producing TiO 2/SiO 2 optical multilayer systems by electron beam evaporation of TiO 2 and SiO 2 starting materials are investigated. Manufacture and techniques of cold mirror and the adhesion,stability, wear and corrosion resistance of cold mirror by this process are discussed. The result shows that cold mirror produced has good optical properties and better adhesion. A process suitable for production on a large scale of cold light mirror for film projector is introduced. Deposition parameters required for producing TiO 2/SiO 2 optical multilayer systems by electron beam evaporation of TiO 2 and SiO 2 starting materials are investigated. Manufacture and techniques of cold mirror and the adhesion,stability, wear and corrosion resistance of cold mirror by this process are discussed. The result shows that cold mirror produced has good optical properties and better adhesion.
出处 《Semiconductor Photonics and Technology》 CAS 2000年第1期59-64,共6页 半导体光子学与技术(英文版)
关键词 Cold light mirror Deposition process Optical coatings 冷光镜 淀积过程 电子束消散 光学涂层 TiO2 SiO2
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参考文献1

  • 1Rao K N,Thin Solid Films,1989年,176卷,1/2期,181页

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